Accurate coplanarity measurement of a network of points, using linear CCD sensors and a sweeping laser beam

Abstract

A method for a real time remote accurate coplanarity measurement of a network of points is presented. A light surface, generated by a laser and a rotating pentaprism, is used as a reference plane to which the relative positions of a set of CCD sensors, located on the nodes of the network, are determined. Based on this method, a prototype for the alignment of the CMS detector has been built and tested. Position reconstruction algorithms and experimental test results are presented. The obtained position measurement precision was 10 um up to distances of 6 m.