Electron scattering cross sections for SF6 and SF5CF3 at intermediate and high energies (100-10000 eV)

Abstract

A modified experimental apparatus with improved angular resolution and stability has been used to measure the total electron scattering cross sections for SF6 and SF5CF3 in the energy range of 100–5000 eV. A detailed analysis of the experimental error sources is provided. The experimental results are compared with integral elastic and inelastic cross sections calculated using the independent atom model approximation and a modified single-center additivity rule for electron energies ranging from 1 to 10000 eV. The accuracy of these approximations method is discussed through a comparison with the experimental results. Previous cross-sectional data for SF6 are compared with the present theoretical and experimental results. For SF5CF3, we present the first electron scattering cross-sectional data for the 100–10000 eV energy range, as well as the first empirical determination of the molecular polarizability.