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Título : | Indium tin oxide obtained by high pressure sputtering for emerging selective contacts in photovoltaic cells. |
Autor : | Caudevilla, Daniel San Andrés, Enrique García-Emme, Eric Pérez, Francisco Torres, Ignacio Barrio, Rocío García-Hernansanz, Rodrigo Olea, Javier Pastor, David Prado, Álvaro |
Palabras clave : | High Pressure Sputtering photovoltaics transparent conductors Selective contacts |
Fecha de publicación : | 14-jun-2024 |
Resumen : | This article studies the physical and electrical behavior of indium tin oxide layers (ITO) grown by an unconventional
technique: High Pressure Sputtering (HPS), from a ceramic ITO target in a pure Ar atmosphere. This
technique has the potential to reduce plasma induced damage to the samples. The aim is to obtain, at low
temperature via HPS, good quality transparent conductive oxide layers for experimental photovoltaic cells with
emerging selective contacts such as transition metal oxides, alkaline metal fluorides, etc. We found that the
resistivity of the films was strongly dependent on Ar pressure. To obtain device-quality resistivity without
intentional heating during deposition a pressure higher than 1.0 mbar was needed. These films deposited on glass
were amorphous, presented a high electron mobility (up to 45 cm2V 1s 1) and a high carrier density (2.9 × 1020
cm 3 for the sample with the highest mobility). The optimum Ar pressure range was found at 1.5–2.3 mbar.
However, the resistivity degraded with a moderate annealing temperature in air. Finally, the feasibility of the
integration with photovoltaic cells was assessed by depositing on Si substrates passivated by a-Si:H. The film
deposited at 1.5 mbar was uniform and amorphous, and the carrier lifetime obtained was 1.22 ms with an
implied open circuit voltage of 719 mV after a 215 ◦C air anneal. The antireflective properties of HPS ITO were
also demonstrated. These results show that ITO deposited by HPS is adequate for the research of solar cells with
emerging selective contacts. |
URI : | http://documenta.ciemat.es/handle/123456789/3043 |
Aparece en las colecciones: | Artículos de Energía
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