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High-pressure sputtering deposition and in situ plasma oxidation of TiOx thin films as electron selective contact for photovoltaic applications
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High-pressure sputtering deposition and in situ plasma oxidation of TiOx thin films as electron selective contact for photovoltaic applications
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2025 - High-pressuresputteringdepositionandinsituplasmaoxidationofTiOx thinfilmsaselectronselectivecontactforphotovoltaicapplications.pdf
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